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CVD System consists of tube furnace,gas supply system and vacuum unit.
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Split vacuum tube furnace
BTF-1200C
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BTF-1200c can supply vacuum&atmosphere protection environment .
It is easy to installation and dispatch.From the transparent quartz chamber,the state of sintering can be observed.
Pneumatic spring structure make the operator easy to open it.
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Tube size
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Φ50 ×1000mm（tube size can be optional)
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Heating element
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Fe-Cr-Alloy adopted by Mo
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Zone length
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Heating :440mm Constant:200mm
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Temperature controller
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*30 programmable segments for precise control of heating rate ,cooling rate and dwell time.
*Built in PID automatic tune function with overheating&brocken thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants.
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Accuracy
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±1℃
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Suggest heating rate
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15℃/min
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Standard accessories
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quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block1 pc.
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Gas-supply system 3 channels MFC,GMF-3Z
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Connector style
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Double cutting ferrule stainless steel connector
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Standard range(N2)
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50sccm、100sccm、200sccm(optional)
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Accuracy
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±1.5%FS
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Linearity
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±0.5～1.5%
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Working pressure range
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0.1～0.5 MPa
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Max.pressure
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3MPa
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Connector
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Φ6,1/4''
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Display
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LCD touch screen 3 figrues show
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Working tem. environment
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5~45 High purity gas
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Pressure vacuum gauge
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-0.1~0.15 MPa（0.01 MPa/grid）
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Inter&exter Parabolic ss pipe
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Φ6
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Low vacuum unit，Vau-02
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Relative air humidity
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≤85%
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Working voltage
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220V±10% 50~60HZ
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Air bleed rate
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8m³/h
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Experiment vacuum
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1.0X10-1Pa
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Oil capacity
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1.1L
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Inlet/Outlet caliber
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KF25
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Rotation rate
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1450rpm
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Noise
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50dB
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