Two-dimensional material growth system, BTF-1200C-II-SSL-CVD
Main features:
Ø This device provides two independent sliding temperature fields，independently controlled. The heating zone of each temperature field is 230mm long. It can advance or push away the sample during the experiment, providing two positions of rapid rise and cooling
Ø Longitudinal multi-interface vacuum flange design, various additional interfaces are highly scalable. The aviation aluminum alloy flange bracket is beautiful in appearance, light and strong, corrosion-resistant, and easy to install and adjust. It is inconvenient to avoid the adjustment and adjustment of the traditional sheet metal flange bracket. When installing various accessories, it is easy to cause the flange to leak or even the quartz tube to be accidentally broken.
Ø the flange end is sealed by a clamp, which makes the feeding and discharging more convenient.
Ø It adopts touch screen control, parameter setting and operation are intuitive and convenient, and parameters are automatically recorded and maintained.
Ø Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements.
Technical Parameters
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Furnace
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Max. Temp
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1200°C
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Power
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2KW (220V)
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zone length
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Heating：230+230mm
Constant：80+80mm
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Temperature Controller
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l PID automatic control and auto-tune function.
l 30 programmable segments for precise thermal processing.
l Built-in protection for the over-heated and broken thermocouple.
l Operation interface is 10 “ touch screen
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Heating Elements
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· Resistance wire, Fe-Cr-Al Alloy doped by Mo
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Temperature Accuracy
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+/- 1 °C
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Processing tube
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Size：Φ50*1200mm
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Gas supply system
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Connector style
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Double cutting ferrule stainless steel connector
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Standard range(N2)
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50sccm、100sccm、200sccm、500sccm； optional
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Accuracy
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· ±1.5%FS
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Response time
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Gas characteristics：1～4sec
Electrical characteristics:10sec
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Linearity
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±0.5～1.5%
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Working pressure difference range
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0.1～0.5MPa
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Max. pressure
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· 3MPa
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Pressure vacuum gauge
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－0.1～0.15 MPa, 0.01 MPa/grid
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Vacuum unit
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Relative air humidity
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≤85%
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pumping
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10m³/h
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vacuum
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10-1Pa
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Oil capacity
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1.1L
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Rotation rate
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1450rpm
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Noise
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50dB
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